FTIR-ATR evaluation of organic contaminant cleaning methods for SiO2 surfaces.

نویسندگان

  • Akihito Shinozaki
  • Kenta Arima
  • Mizuho Morita
  • Isao Kojima
  • Yasushi Azuma
چکیده

The effectiveness of cleaning organic contaminants from silicon dioxide (SiO2) surfaces was studied by conducting highly sensitive measurements using Fourier Transform Infrared Attenuated Total reflectance (FTIR-ATR) with a Si prism as the waveguide. To serve as an example, the surface of the prism was oxidized to an order of a few nanometers. The oxidized Si surface film was allowed to stand in the atmosphere and then wet-cleaned in a repeated manner; subsequently its thickness was measured by ellipsometry. Although, various wet-cleaning methods were tested, they only showed values of 0.1-0.2 nm larger than, but not equal to, the original thickness immediately after oxidation. FTIR-ATR measurements of the spectral change after exposure to air revealed that organic species, such as C-CH3 and -(CH2)n-, increased with time. Wet-cleaning the sample failed to remove the C-CH3 species, which indicates that they corresponded to the film thickness increment from the original.

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Evaluation of Pre-Fixed Biological Tissues Preparation Methods for ATR-FTIR Biospectroscopy

Evaluation of Pre-Fixed Biological Tissues Preparation Methods for ATR-FTIR Biospectroscopy Fourier transform infrared (FTIR) spectroscopy in ATR (attenuated total reflection) mode is a powerful tool for studying biomedical samples, which can provide important structural information on the molecular composition. Currently, formalin fixation and paraffin preservation (FFPP) is the preferred sourc...

متن کامل

Fabrication of MgF2-SiO2 Nanocomposite Thin Films and Investigation of Their Optical and Hydrophobic Properties

In this research, MgF2-2%SiO2/MgF2 thin films were applied on a glass substrate. At first, MgF2 thin films with the optical thickness were deposited on the glass slide substrates. Then, MgF2-2%SiO2 thin films were deposited on the glass coated with MgF2 thin films. Finally, the nanocomposite thin films were surface treated by the PFTS solution. Characterization of the thin film was done by X-Ra...

متن کامل

Elucidation of functional groups on gram-positive and gram-negative bacterial surfaces using infrared spectroscopy.

Surface functional group chemistry of intact Gram-positive and Gram-negative bacterial cells and their isolated cell walls was examined as a function of pH, growth phase, and growth media (for intact cells only) using attenuated total reflectance Fourier transform infrared (ATR-FTIR) spectroscopy. Infrared spectra of aqueous model organic molecules, representatives of the common functional grou...

متن کامل

Correlating Cleaning Thoroughness with Effectiveness and Briefly Intervening to Affect Cleaning Outcomes: How Clean Is Cleaned?

OBJECTIVES The most efficient approach to monitoring and improving cleaning outcomes remains unresolved. We sought to extend the findings of a previous study by determining whether cleaning thoroughness (dye removal) correlates with cleaning efficacy (absence of molecular or cultivable biomaterial) and whether one brief educational intervention improves cleaning outcomes. DESIGN Before-after ...

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

ثبت نام

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

عنوان ژورنال:
  • Analytical sciences : the international journal of the Japan Society for Analytical Chemistry

دوره 19 11  شماره 

صفحات  -

تاریخ انتشار 2003